Fabrication of SOI-Based Nanowire Sensors
نویسندگان
چکیده
Silicon nanowire sensors are fabricated from the active silicon layer of silicon-on-insulator (SOI) wafers and used for label-free sensing of specific proteins. A fabrication method is demonstrated which avoids the integration difficulties inherent in a bottom-up approach, without the drastic decrease in carrier mobility usually associated with reactiveion-etched nanowires. Nanowire devices are used to demonstrate the label-free detection of below 10 femtomolar concentrations of specific proteins.
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